產品簡介
藍寶石(Sapphire,又稱白寶石,分子式為Al2O3)單晶是一種優秀的多功能材料。它耐高溫,導熱好,硬度高,透紅外,化學穩定性好。廣泛用于工業、國防和科研的多個領域(如耐高溫紅外窗口等)。同時它也是一種用途廣泛的單晶基片材料,是當前藍、紫、白光發光二極管(LED)和藍光激光器(LD)工業的首選基片(需首先在藍寶石基片上外延氮化鎵薄膜),也是重要的超導薄膜基片。
產品規格說明
1.常規藍寶石晶片
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Crystal Materials
99,996% of Al2O3,High Purity, Monocrystalline, Al2O3
Crystal quality
Inclusions, block marks, twins, Color, micro-bubbles and dispersal centers are non-existent
Diameter
2inch
3inch
4inch
5inch ~ 7inch
50.8± 0.1mm
76.2±0.2mm
100±0.3mm
In accordance with the provisions of standard production
Thickness
430±15μm
550±15μm
650±20μm
Can be customized by customer
Orientation
C- plane (0001) to M-plane (1-100) or A-plane(1 1-2 0) 0.2±0.1° /0.3±0.1°, R-plane (1-1 0 2), A-plane (1 1-2 0 ), M-plane(1-1 0 0), Any Orientation , Any angle
Primary flat length
16.0±1mm
22.0±1.0mm
32.5±1.5 mm
In accordance with the provisions of standard production
Primary flat Orientation
A-plane (1 1-2 0 ) ± 0.2°
TTV
≤10μm
≤15μm
≤20μm
≤30μm
LTV
≤10μm
≤15μm
≤20μm
≤30μm
TIR
≤10μm
≤15μm
≤20μm
≤30μm
BOW
≤10μm
≤15μm
≤20μm
≤30μm
Warp
≤10μm
≤15μm
≤20μm
≤30μm
Front Surface
Epi-Polished (Ra< 0.2nm)
Back Surface
Fine ground (Ra=0.5 to 1.2 μm), Epi-Polished (Ra< 0.2nm)
Note
Can provide high-quality sapphire substrate wafer according to customers' specific requirement
2. R面藍寶石晶片
公司根據客戶的特殊需求,也另生產R面藍寶石晶片!
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4寸R面藍寶石襯底
項目規格
尺寸與公差
單位
直徑
100±0.3
mm
厚度
500
μm
厚度公差
±20
μm
晶向
R面
定向精度
定向精度<0.08°(5′)
基準邊
邊長:32.5 ± 1.5
mm
基準邊晶向
(0ī11)
---
定向精度<0.08°(5′)
表面粗糙度
<0.2
nm
翹曲度(Warp)
<20
μm
表面處理
雙面拋光
N/A
商品標簽